Semiconductor chips are used in personal computer, mobiles phones, TV, automobiles, and electric appliances, and these chips are not only critically considering in essence of modern industrial products, but they are also becoming a part of our modern civilization. Especially for using in mobile phones and for automobile applications, a reliability is the most important to utilize these products without issues.
Current situation in semiconductor manufacturing process
In the manufacturing process of semiconductors, cost reduction has become the most important item by reducing the defects in a chip that are associated with reduced products - caused by improving the reliability of the device
Fujikom's proposal for the semiconductor manufacturing process
At present, a variety of inspection tools are being in production line of the chip manufacturing process. Identification of a particular defects in each process that occurs has resulted in the reduction of wafer productivity in each process, we can specify the cause of each defects and monitor the sate of wafer. By doing that, we provide necessary and critical information to users for identifying source of a defect, rather than simply monitoring wafers through current inspection tools. PRESTIGE has been designed and developed by our engineer's efforts and aspirations. Also, PRESTIGE incorporates many cutting-edge and it can be applied to may fields such as LED MEMS and Nanoiimprint.
Features of PRESTIGE
Quickly detecting problems that attribute to the direct cause of yield loss has been characterized a feedback to the process. Defect position information in additions to the location of the defect, understanding the sate of the overall wafer, isolating the source of defect and analyzing the defect cause are some of the key features of PRESTIGE
Applications of PRESTIGE
Lithographic process, thin film process, CMP process, etching process stage, Epi process and so on.
h4>Process Management by PRESTIGEPattern pitch movement, Defocus / Dose, Polishing abrasive state, Uniformity by spin coating, Pattern defect, Contamination
PRESTIGE Line-up
- PRESTIGE HT
- Process control is a primary function in a mass production facility.Also, it is capable of inspecting wafers for yields loss that can be possibly caused by major defects and its inspection speed is very fast (120 wafers/per hour)
- PRESTIGE HR
- Including all functions and capabilities of PRESTIGE HT
HR model has automatic analyzing function for causality of rooting defect by high sensitivity inspection process This system is suitable for using in R&D and a small lot facility that requires near 100% yield management. - PRESTIGE HC
- It has a variety of functions and options that essentially meet the full automatic capability. It also can add special functions as option that your company may need for the most desirable performance.
PRESTIGE supports 8 inch - 12 inch. Methods of wafer handling could be Open Cassette", "SMIF-Pod", and "FOUP"
