Nanoimprint technology is such as transferring a pattern pressed into the mold to form resist pattern on a substrate of irregularities. By using this technology, the conventional process is necessary to repeat the same process many times, however, it significantly reduces the exposure and etching processes. It is possible to reduce the manufacturing cost and shorten the time. Because of its adaptation to process also requires a micro fabrication, micro optics, storage media, nano bio devices have been deployed in the field of cell grown elements and so on.
Current situation in nanoimprint process
By taking advantage of the biggest feature for nanoimprint technology with low costs.
It will fabricate nanometer scale pattern on the large-to-large area
Fujikom's proposal to nanoimprint industry
Currently the mainstream of the manufacturing process of nanoimprint in fixed-point observation is virtually done by Fab operator. High speed inspection is required against larger area of patterning with variety of materials on substrate need the quantification of the test results. For the purpose of solving various issues, we developed PREVISON.
Features of PREVISON
By linking the results of mold inspection and transcript side substrate inspection, it can identify the problems and defects. It supports glass- and resin materials. It is made from transparent substrate - Nickel (Ni) and metal mold
Applications of PREVISION
Quartz mold, Si mold, Ni electroforming, metal mold, various film imprinting, glass fabrication, resist patterning on substrate, light guiding plate
Process Management by PERVISON
Adhesion on mold, mold swerve, pattern deformation on mold, pattern abnormality at transcript (pitch/height), scratch, contamination, and so on
PERVISON Line-up
- PERVISON BM
- It mainly uses for engineering and R&D purpose. It offers price advantage by equipping only for required functions
- PERVISON CZ
- It covers from R&D and engineering to full production. It is equipped with automatic wafer loading, highly quantitative review functions and so on
NOTE:
If you want to use as roll-to-roll method, PULSAR is may be the best choice.
